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  • Hestia:Automated Plasma Treatment System
  • The Hestia offers exceptional treatment uniformity with throughput and low risk, enabled by a compact vacuum chamber design and a fully automated material handing system.


Hestia  Specifications
EnclosureWxDxH1550Wx1530Dx1760H mm- 2050H mm With light tower
ChamberVolume5L
ElectrodesMax Number334W x 334D mm
PF SystemRF Power&Frequency500W/13.56MHz
Gas ControlNumber of MFCs2 standard/ up to 4
Vacuum PumpPump28m³/h Dry Pump
Dry Pump Purge N2 Flow5-25L/min
Facility ReauirementsPower Supply220V, 25A, 50Hz, Single-Phase, 9AWG ,5-Wire
Process Gas Fitting Size&Type0.25 in.OD
Process Gas Purity

CF4 = 99.97%; O2 = 99.996%;  N2 = 99.99%;

Ar = 99.999%;  Consult the JETPLASMA for the rest of the gas

Process Gas Pressure15~20 psig
Purge Gas Fitting Size&Type0.25 in.OD
Purge Gas PurityN2=99.99%
Purge Gas Pressure10~60 psig
Pneumatic Valves Fitting Size&Type0.25 in.OD
Pneumatic Gas SpecificationsCDA、60-90 psig
Exhaust Size & TypeKF25
Working Temperature5~40℃
Working Humidity40~60%