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  • Hestia:Automated Plasma Treatment System
  • The Hestia offers exceptional treatment uniformity with throughput and low risk, enabled by a compact vacuum chamber design and a fully automated material handing system.


Hestia  Specifications
EnclosureWxDxH2020W*1250D*1610H mm( 含灯塔高2015mm)
ChamberVolume6L
ElectrodesMax Number334W x 432Dmm
PF SystemRF Power&Frequency600W/13.56MHz
Gas ControlNumber of MFCs2 standard/ up to 4
Vacuum PumpPump80m³/h Dry Pump
Dry Pump Purge N2 Flow5-25L/min
Facility ReauirementsPower Supply380V,25A,50Hz,3-Phase,5-Wire
Process Gas Fitting Size&Type0.25 in.OD
Process Gas Purity

CF4 = 99.97%; O2 = 99.996%;  N2 = 99.99%;

Ar = 99.999%;  Consult the JETPLASMA for the rest of the gas

Process Gas Pressure15-30 psig
Purge Gas Fitting Size&Type0.25 in.OD
Purge Gas PurityN2=99.99%
Purge Gas Pressure15-30 psig
Pneumatic Valves Fitting Size&Type外径8mm PU软管
Pneumatic Gas SpecificationsCDA、60-90 psig
Exhaust Size & TypeKF40
Working Temperature15-30 ℃
Working Humidity40~60%